RF Power Generator

Our RF power supply chooses high quality components and mature design scheme to optimize the reliability and life of products, so as to maximize your investment and process capability. User friendly, easy to operate, easy to start, can reduce the cost of personnel training for customers, improve the efficiency of operators. The whole power supply system uses PIC logic chip and top A/D conversion chip to control the RF output power in a closed loop way, which makes the product have extremely stable power output and reduces the power fluctuation caused by the change of plasma impedance. The panel operation is intuitive, fast and simple, with master/slave power supply settings, diagnostic instructions for various problems, providing a variety of external user ports for customers to choose, including RS232, RS485, DB25 pin analog user ports, interface communication control with the matcher, super large LED display directly shows the real-time matching capacitance size.

Our power supply has a variety of frequency bands and power choices, bands of 2 MHz, 4 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz, the main specifications of rated power are 100W, 500W, 1000W, 2000W, 4000W.